WORLDEX

Quartz

Quartz is widely used as parts material in semiconductor and solar power industries due to its outstanding high temperature stability, chemical resistance and corrosion resistance. In the processing of semiconductors, Quartz-parts are used in the Etching and Diffusion process due to its characteristic of highly purified quartz glass fiber
and our Quartz-parts are primarily used in the Etching process.
Key Quarts-parts manufactured from our company include Rings (Focus Ring, 2-step Ring), GDP, Bell Jar, Caps, etc.

Quartz Ring

Focus Ring

2-step Ring

Other Ring

Product Name	Focus Ring	2-step Ring	Other Ring
Product Description	ESC protection and Plasma density control	Role of controlling Plasma pressure	Role of controlling internal Gas pressure
Application	Semiconductor Oxide Etch
Type	Inner Focus Ring Top Edge Ring Cover Ring	Shield Ring Combo Ring	Confinement Ring Wap Ring Pressure Control Ring

Quartz Tube, Boat, Others

Quartz Tube

Quartz Boat

Quartz other parts

Product Name	Quartz Tube	Quartz Boat	Quartz other parts
Product Description	Role of protecting external contamination and Gas channel	Role of container for transportation to the high temperature substance melting and wafer process	Electrodes for diffusion of GAS
Application	Entire semiconductor structure	Dry Etch Diffusion process of semiconductor	Entire semiconductor structure
Type	Inner Tube Protect Tube Gas feed Tube	Boat Ramco LOT Boat	Quartz G.D.P Shower Plate